Basa reMatsime eIon muKuputira Vacuum: Kubva paKushanda Kwepamusoro kusvika paKuvandudza Mafirimu

Kunzwisisa Mashandisirwo Akakosha Ezvinhu zveIon muVacuum Coating

Mukati maitiro ekuputira vacuum zvakaita se PVDuye PECVD, manyuko eayoni dzimwe nguva anoonekwa sezvinhu zvisingadiwi. Zvisinei, mukushandiswa kwe coating inoshanda zvakanyanya, anowanzova chinhu chakakosha pakusarudza mhando ye coating.

Mumaindasitiri akadai se maturusi ekucheka, zvikamu zvemazvo, uye zvikamu zvemagetsi, tekinoroji yekushandiswa kwemaion—kuburikidza Kubatsirwa kweIon (IAD)—inogona kuvandudza zvakanyanya kunamira kwejira, kuwanda kwaro, uye kugadzikana kwaro. Saka yave tekinoroji yakakosha yekuvandudza mashandiro ejira.

Mumhinduro dzemidziyo yekuputira dzakagadzirwa ne Huasheng Nanotechnology, tekinoroji yesosi yeion inowanzo batanidzwa mu Masisitimu ePVD, DLC, uye PECVD, ichipa kudzora kwakasimba kwedanda remaion uye kugadzira hwaro hwekufukidza hwakavimbika hwezvinhu zvakasiyana-siyana uye zvikamu zvakaoma.

1. Nheyo Yekutanga Yekushanda Kwechitubu cheIon

Basa guru re ion source ndere kugadzira nekukurumidzisa ma ion matanda ane simba rakawanda.

Mukati mekamuri re ionization, magasi asina simba (kazhinji argon) kana magasi anochinja-chinja anogadzirwa kuti aumbe zvidimbu zvinochajwa. Ma ions aya anokurumidziswa nesimba remagetsi uye anonangidzirwa kunzvimbo yakanangwa kana pamusoro pechinhu chebasa, zvichibatanidzwa mukuita kwekuputira.

Maitiro acho anogona kurerutswa seizvi:

Gasi → Kuiswa kweIon → Beam reIon → Kukurumidzisa → Kubhomba Pamusoro

Iyo simba, gwara, uye kuwandayedanda reion zvese zvinogona kudzorwa, zvichiita kuti kudzorwa kwacho kuve kwakanyatsojeka.

Mumidziyo yemazuva ano yekuputira vacuum, ma ion sources haangoshandiswi chete panguva yekuisa zvinhu asi anotambawo mabasa mu kurapwa kusati kwaitwa, kuiswa kwejira rekufukidza, uye matanho ekurapa mushure mekurapwa.

2. Mashandisirwo Matatu Ekutanga Ezvinhu zveIon muVacuum Coating

• Usati Waisa Pendi: Kuchenesa Pamusoro Uye Kushanda

Hunhu hwekuputira hunoenderana zvakanyanya nemamiriro epamusoro pe substrate.

Kana pamusoro payo paine zvikamu zve oxidation, kusvibiswa kwemafuta, kana micro-particles, kunamira kwe coating kunogona kuderedzwa zvakanyanya.

Matsime eIon anoshandiswa zvakanyanya kuchenesa maionusati waisa chiratidzo.

MaIon ane simba guru anoputira pamusoro pechinhu chebasa kuti:

Bvisa zvidimbu zve oxide nezvinosvibisa

Bvisa zvidimbu zvidiki-diki

Shandisa simba repamusoro rechinhu chacho

Panguva imwe chete, kuputika kwemaion kunogadzira pamusoro pakakoshwa nemaikorosikopu, zvichipa nzvimbo dzakawanda dzekubatanidza firimu rakachengetwa.

"Chimiro ichi che "micro-anchoring structure" chinovandudza zvakanyanya kunamira kwe coating uye chinobatsira kudzivirira kudonha kana kucheka coating.

Danho iri rakakosha zvikuru mu kucheka maturusi ekufukidza mashandisirwo.

• Munguva Yekuputira: Kuisa Ion-Assisted Deposition (Basa Guru)

Basa guru rema ion sources rinoitika panguva yekuisa ma ion muchikamu chekuisa ma ion.

Apo maatomu ekupenda ari kuiswa pamusoro pevhu, mwenje yeion inoputira firimu rinokura panguva imwe chete, zvichigadzira maitiro ekuisa ion-assisted deposition.

Maitiro aya anounza mabhenefiti akati wandei.

Kuvandudza Kuwanda Kwemafirimu

Kuputika kwemaion kunokurudzira kugadziriswa kwemaatomu mukati meganda riri kukura, zvichiita kuti chimiro chefirimu chive chidiki.

Mhedzisiro yacho inosanganisira:

Maburi madiki akaderedzwa

Kudzika kweporosity

Kudzivirira ngura kwakavandudzwa

Kudzivirira kupfeka kwakanyanya

Kuvandudza Kufanana Kwekupfeka

Kune ma geometri akaomarara, nzira dzechinyakare dzekuisa zvinhu dzinogona kugadzira mumvuri, zvichisiya dzimwe nzvimbo dzisina kuputirwa zvakanaka.

Matanda eIon anogona kutungamirirwa kuti atsigire nzvimbo idzi, zvichivandudza kufanana kwependi.

Izvi zvinonyanya kukosha kune:

Kucheka mipendero yezvishandiso

Zvikamu zvemazvo

Zvivakwa zvine mativi matatu

Kudzora Mafirimu Madiki

Nekugadzirisa simba re ion beam, chimiro chekristaro uye nzira yekukura kwe coating zvinogona kuchinjwa.

Semuyenzaniso:

Kuvandudza kuramba kupfeka kwezvipfeko zvakaoma

Kuvandudza chitarisiko nekupenya kwemachira ekushongedza

Kuvandudza kujeka uye kugadzikana kwezvipfeko zvakakora

Kugona uku kwakakosha muzvikumbiro zvinoda kuomarara kwakanyanya uye kupfeka kwakasimba.

• Mushure mekuputira: Kugadziriswa kwefirimu

Mune mamwe maitiro epamusoro ekuputira, manyuko eion anoshandiswawo mushure mekurapwa kwejira.

Kubhomba kwemaion kwefirimu rakaiswa kunogona:

Deredza kushushikana kwemukati mukati mekuputira

Kuvandudza simba rekubatanidza pakati pekuputira ne substrate

Wedzera kutsetseka kwepamusoro

Deredza chiyero chekukweshana

Kurapa uku kunowanzo shandiswa mu DLC (yakaita sedhaimani) machira ekuputiranemamwe mafirimu anoshanda.

3. Mashandisirwo eIon Sources muMaitiro Akasiyana Ekuputira

Manyuko eIon anogona kusanganiswa nehunyanzvi hwakasiyana-siyana hwekuputira, nemabasa akasiyana zvichienderana nemaitiro acho.

• Kudhonza Magnetron yePVD

Mukushandiswa kwemagnetron sputtering, ma ion sources anonyanya kubatsira ku:

Kuvandudza kunamatira kwekuputira

Wedzera kuwanda kwekuvhara

Deredza kusiyana kwemavara mumafirimu ekushongedza

Maitiro akajairika anosanganisira:

Kucheka machira ekushandisa

Dzimba dzenharembozha

Kupfeka kwekushongedza

• Kuputira kweVacuum Evaporation

Kuputira kwemvura kunopa mwero wepamusoro wekuisa zvinhu muvhu asi kazhinji kunogadzira mafirimu ane maburi.

Matsime eIon anobatsira kukunda zvipingamupinyi izvi ne:

Kuwedzera kuwanda kwekuvhara

Kuvandudza kugadzikana kwemafirimu

Kuvandudza mashandiro e optical

Maitiro akajairika anosanganisira:

Magirazi emaziso

Mafirita

Kupfeka kunopenya

• Maitiro ePECVD

Mumaitiro ePECVD, masosi eion anogona kubatsira mukuita kuti magasi anochinja-chinja ave mayoni zvinobudirira.

Mabasa avo makuru anosanganisira:

Kuwedzera kwehuwandu hwekuisa mari

Kuvandudza kufanana kwekuvhara

Kuvandudza kugadzikana uye kugara zvakanaka kwefirimu

Maitiro akajairika anosanganisira:

Mafirimu ekudzivirira kupisa

Kupfeka kunoshanda

Mafirimu matete ane chekuita ne semiconductor

4. Zvinhu Zvikuru Pakusarudza Matsime EIon

Mashandisirwo akasiyana ekuputira anoda magadzirirwo akasiyana ema ion source.

Zvikamu zvikuru zvekufunga nezvazvo zvinosanganisira:

• Ion Beam Energy Range

Inoona kugona kwebhomba uye kugona kudzora chimiro chekuputira.

• Kugadzikana kweIon Beam

Matanda eion akagadzikana anoita kuti kufukidza kuenderane uye kubereka goho rakawanda.

• Ion Source Hupenyu Hwese

Nguva refu yekushanda inoderedza mari yekugadzirisa uye inovandudza mashandisirwo emidziyo.

• Upamhi hweIon Beam

Matsime eion ane danda rakafara anonyanya kukodzera kugadzira maworkpiece munzvimbo yakakura kana kugadzira batch.

Mukuita, kusarudzwa kunofanirwa kufunga nezve zvinhu zvekuputira, rudzi rwekuputira, uye zvinodiwa zvekushandisa.

5. Huasheng Nanotechnology uye Ion-Assisted Coating Technology

Mukushandiswa kwekuputira mumaindasitiri, tekinoroji yekushandiswa kwemaion yave chikamu chakakosha chemasisitimu ekuputira anoshanda zvakanyanya.

Mukuvandudzwa kwe PVD, DLC, uye Midziyo yekuputira yePECVD, Huasheng Nanotechnologyinoshandisa matekinoroji anobatsirwa neion kuti ivandudze maitiro ekuputira, akadai se:

Kuvandudza kunamira uye kuramba kupfeka kwezvipfeko zvekucheka

Kuvandudza kufanana kwekuvhara pazvikamu zvakaoma

Kuwedzera kugadzikana uye kuenderana kwezvipfeko zvinoshanda

Kuburikidza nemusanganiswa we dhizaini yemidziyo uye kugadzirisa maitiro, tekinoroji ye ion source inogona kupa mashandiro akagadzikana mumhando dzakasiyana dze coating applications.

Mhedziso

Kukosha kukuru kwezvitubu zveion kuri mukukwanisa kwavo kusimudzira maitiro echinyakare ekuputira kuburikidza nekuisa ion-assisted deposition.

Kubva pakuchenesa pamusoro usati waisa pendi, kusvika pakusimbisa kukura kwefirimu panguva yekuiswa kwependi, uye kunyange kugadzirisa hunhu hwefirimu mushure mekuisa pendi, manyuko eayoni ane basa mukati mekuita kwese kwekuisa pendi.

Sezvo maindasitiri ekugadzira achida kushanda kwepamusoro kwekuputira, ma ion sources ari kuwedzera kukosha mumichina yemazuva ano yekuputira vacuum.